View all instruments of this unit AMAT Defect Inspection Applied Materials Inc. (AMAT) Compass Pro
Basic Information
| Name: | AMAT Defect Inspection | |
| Manufacturer: | Applied Materials Inc. (AMAT) | |
| Model: | Compass Pro | |
| Facility: | MEMS Technologies Dresden | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
Description
Measure/Resolution:
90nm
Link to Further Details
Points of Contact
Mr. Michael Müller
Web:
Phone:
+49 351 8823-130
Fax:
+49 351 8823-393
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Last Update
Last updated at: 13 July 2017 at 11:54:12