View all instruments of this unit Surface Profilometer KLA-Tencor Corporation Surface Profiler P16
Basic Information
| Name: | Surface Profilometer | |
| Manufacturer: | KLA-Tencor Corporation | |
| Model: | Surface Profiler P16 | |
| Facility: | MEMS Technologies Dresden | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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Description
The KLA-Tencore P-16 is a stylus profilometer capable of scanning over a full 200mm wafer without stitching. It offers a fast accurate method for measure step heights on patterned substrates as well as surface roughness. It also has the added stress measurement option.
Link to Further Details
http://www.kla-tencor.com/surface-profilometry-and-metrology.html
Points of Contact
Mr. Michael Müller
Web:
Phone:
+49 351 8823-130
Fax:
+49 351 8823-393
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
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KLA-Tencor Profilometer P 16 |
Last Update
Last updated at: 13 July 2017 at 11:54:12