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Non-contact 3D optical profiler / White Light Interferometer / Confocal Microscope Sensofar Metrology S neox

Basic Information

Name: Non-contact 3D optical profiler / White Light Interferometer / Confocal Microscope
Manufacturer: Sensofar Metrology
Model: S neox
Facility: Chair of Laser-based Manufacturing
Partner: Technische Universität Dresden (TUD)
Partner: Fraunhofer Institute for Material and Beam Technology (IWS)

Description

"Designed as a high-performance 3D optical profiler from the outset, S neox outperforms all existing optical profilers, combining confocal, interferometry and focus variation techniques in the same sensorhead without any moving parts." [www.sensofar.com]

 

Technical Details:

  • Vertical resolution: up to 0,1 nm,
  • Lateral resolution: up to 140 nm

Link to Further Details

http://www.sensofar.com/metrology/sneox/

Points of Contact

Prof. Dr.-Ing. Andrés F. Lasagni / Mrs. Lisa Becher (Sec.)
Email:
Phone:
+49 351 463-37844
Fax:
+49 351 463-37755

Images

Last Update

Last updated at: 12 September 2018 at 11:47:02