Non-contact 3D optical profiler / White Light Interferometer / Confocal Microscope Sensofar Metrology S neox
Basic Information
Name: | Non-contact 3D optical profiler / White Light Interferometer / Confocal Microscope | |
Manufacturer: | Sensofar Metrology | |
Model: | S neox | |
Facility: | Chair of Laser-based Manufacturing | |
Partner: | Technische Universität Dresden (TUD) | |
Partner: | Fraunhofer Institute for Material and Beam Technology (IWS) |
Description
"Designed as a high-performance 3D optical profiler from the outset, S neox outperforms all existing optical profilers, combining confocal, interferometry and focus variation techniques in the same sensorhead without any moving parts." [www.sensofar.com]
Technical Details:
- Vertical resolution: up to 0,1 nm,
- Lateral resolution: up to 140 nm
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Last Update
Last updated at: 12 September 2018 at 11:47:02