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Ultra-High-Resolution analytical DualBeam FIB/SEM system FEI (now: Thermo Fisher Scientific) Scios LoVac Dual Beam

Basic Information

Name: Ultra-High-Resolution analytical DualBeam FIB/SEM system
Manufacturer: FEI (now: Thermo Fisher Scientific)
Model: Scios LoVac Dual Beam
Facility: Multi-Scale Analysis (Zlotnikov Group)
Partner: Technische Universität Dresden (TUD)

Short Description

"FEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic material." [www.fei.com]

Description

The Scios is a combination of a Scanning Electron Microscope (SEM) and a Focused Ion Beam (FIB) system. "FEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic material." [www.fei.com]

 

Scios LoVac Dual Beam FIB/SEM (FEI) equipped with:

  • Hikari Plus EBSD (EDAX)
  • Octane Elite Super EDS (EDAX)
  • Cryo-cleaner and Plasma-cleaner
  • AutoSlice and View, 3D-EDS, 3D-EBSD
  • Q150T ES Sputter-coater (Quorum)
  • PI85 in-situ nanomechanical characterization and manipulation system

Link to Further Details

https://www.fei.com/scios/

Points of Contact

Dr. Igor Zlotnikov
Email:
Phone:
+49 351 463 43090

Images

Last Update

Last updated at: 17 August 2018 at 13:20:06