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View all instruments of this unit Ultra-High-Resolution analytical DualBeam FIB/SEM system FEI (now: Thermo Fisher Scientific) Scios LoVac Dual Beam
Basic Information
| Name: | Ultra-High-Resolution analytical DualBeam FIB/SEM system | |
| Manufacturer: | FEI (now: Thermo Fisher Scientific) | |
| Model: | Scios LoVac Dual Beam | |
| Facility: | Multi-Scale Analysis (Zlotnikov Group) | |
| Partner: | Technische Universität Dresden (TUD) |
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Short Description
"FEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic material." [www.fei.com]
Description
The Scios is a combination of a Scanning Electron Microscope (SEM) and a Focused Ion Beam (FIB) system. "FEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic material." [www.fei.com]
Scios LoVac Dual Beam FIB/SEM (FEI) equipped with:
- Hikari Plus EBSD (EDAX)
- Octane Elite Super EDS (EDAX)
- Cryo-cleaner and Plasma-cleaner
- AutoSlice and View, 3D-EDS, 3D-EBSD
- Q150T ES Sputter-coater (Quorum)
- PI85 in-situ nanomechanical characterization and manipulation system
Link to Further Details
Points of Contact
Images
| Preview | Description |
|---|---|
Source: www.fei.com/scios/ |
FEI Scios Dual Beam FIB/SEM |
Last Update
Last updated at: 17 August 2018 at 13:20:06