View all instruments of this unit Multi-Target-Sputteranlage von Ardenne Anlagentechnik LS703S
Basic Information
| Name: | Multi-Target-Sputteranlage | |
| Manufacturer: | von Ardenne Anlagentechnik | |
| Model: | LS703S | |
| Facility: | Chair for Solid-State Electronics (FKE) | |
| Partner: | Technische Universität Dresden (TUD) |
|
| Location: | Vakuumlabor | |
Points of Contact
Prof. Dr.-Ing. habil. G. Gerlach/ Mrs. H. Collasch (Sec.)
Web:
Email:
Phone:
+49 (0)351 463-32077
Fax:
+49 (0)351 463-32320
Last Update
Last updated at: 13 July 2017 at 11:54:08