TraceScout Sensor for the simultaneous detection of up to 3 gases within the ppm- to ppb-range
Informationen
Name: | TraceScout | |
Modell: | Sensor for the simultaneous detection of up to 3 gases within the ppm- to ppb-range | |
Partner: | Fraunhofer-Institut für Werkstoff- und Strahltechnik (IWS) |
Beschreibung
The use of the diode laser enables the simultaneous detection of gas impurities in bulk or special gases. This system allows a continuous gas quality monitoring in circular supply systems or at the point-of-use in the semi-conducting industry. The device has been developed to monitor humid-, oxygen- and methane traces in any matrix gases. However, this system can be adjusted to many other gases as well.
For the quantitative determination of impurities in the lower ppb-range, laser diode spectroscopy is used in the near-infrared range (NIR-LDS). This highly sensitive measurement procedure is extremely selective and has a very wide dynamic range. If several impurities are to be measured simultaneously in the lower ppb range, then a system is required which is carefully optimized in all components and which consists of laser diode spectrometers, an pre-chamber for beam guidance and a multi-reflection gas measurement cell.
Ansprechpartner
Zugangsvoraussetzungen
Performance H2O / 1 bar
Measurement range: 0 - 100 ppm
Detection limit: 25 ppb (3σ)
Measurement resolution: 1 ppb
Exactness: 3 % of the value or 6 ppb
Performance O2 / 1 bar
Measurement range: 0 - 10000 ppm
Detection limit: 3 ppb (3σ)
Measurement resolution: 0.1 ppm
Exactness: 3 % of the value or 1 ppm
Performance CH4 / 1 bar
Measurement range: 0 - 400 ppm
Detection limit: 52 ppb (3σ)
Measurement resolution: 1 ppb
Exactness: 3 % of the value or 11 ppb
General parameters
- measuring gas: inert and - flow rate: 0.5 - 50 slm
corrosive gases - operating pressure: 0.5 - 5 bar
- volumes: approx. 1 l (higher detection limit at 5 bar)
- measuring cell: multi- - surfaces: electropolished stainless
reflection cell, 12.4 m opt. way steel
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Notizen
Advantages of TRACESCOUT
- measurement range: ppb up to %
- non-invasive measurement
- drift-free sensor calibration
- short response times
- corrosion-resistant
- modular sensor structure
Letztes Update
Zuletzt aktualisiert am: 13. Juli 2017 um 11:54:11