Equipment of Institute of Semiconductors and Microsystems

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Anlage zum Chemisch Mechanischen Polieren

Manufacturer: Megapol Fa. Alpisec; G&P Korea
Facility: Chair for Semiconductor Technology

Manufacturer: Fa. RENA und Eigenbau
Facility: Chair for Semiconductor Technology

Manufacturer: Digital Instruments Inc.
Model: DI 3500 M
Facility: Chair for Semiconductor Technology

Manufacturer: FHR Anlagenbau GmbH / IHM TU Dresden
Model: Sonderanfertigung nach Vorgabe IHM
Facility: Chair for Semiconductor Technology

Manufacturer: Philips
Model: XL 40
Facility: Chair for Semiconductor Technology

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