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Institute of Semiconductors and Microsystems (IHM)

Parent Units:
Technische Universität Dresden (TUD)
German name: "Institut für Halbleiter- und Mikrosystemtechnik (IHM)".


web: http://tu-dresden.de/et/ihm
email: e-mail
phone: +49 351 463-35468
fax: +49 351 463-37172
postal address: Technische Universität Dresden (TUD), Institute of Semiconductors and Microsystems (IHM), 01062 Dresden, Germany
office address: Technische Universität Dresden (TUD), Institute of Semiconductors and Microsystems (IHM), Nöthnitzer Straße 64 (Mierdel-Bau, room 209), 01187 Dresden, Germany
partner: Technische Universität Dresden


In the IHM at the TU Dresden several departments are integrated, which work in professional and organizational fields in a close relation. Besides a shared use of resources and the multidisciplinary, work is especially affected by the thought of synergy. The scientific and technological abilities and knowledge of the IHM staff range from electrical engineering to physics and from chemistry to materials science.

At least since the introduction of the so called equivalent scaling in micro- and nanoelectronics the importance of materials became specifically significant. The utilization of nanoelectronic materials exceeds however the area of applications in micro- and nanoelectronics.



Das IHM der TU Dresden bietet neben Beratungsleistungen auch eine breite Palette von unterschiedlichsten Forschungkompetenzen und Entwicklungsdienstleistungen an, die sich in die folgenden Bereiche unterteilen:

  • Charakterisierung
  • Beschichtung
  • Strukturierung
  • Bauelemente
  • Simulation


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View services (6)


Parent Units

name type actions
Faculty of Electrical and Computer Engineering Faculty view

Daughter Units

name type instruments services
Chair for Optoelectronic Components and Systems Professorship
Chair for Semiconductor Technology (HLT) Professorship (22) (6)
Chair of Microsystems Professorship (1)
Nanoelectronic Materials Laboratory (NamLab) Institute

Last Update

Last updated at: 2016-12-16 07:50 CET