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View the profile: Microstructure Facility (MSF)

Equipment of Microstructure Facility (MSF)

Microstructure Facility (MSF)

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Thermal evaporator Kurt Lesker NANO 36 (Quelle: www.lesker.com)

Thermal evaporator

Manufacturer: Kurt J. Lesker Company®
Model: NANO 36™
Facility: Microstructure Facility

Hot Plate Electronic Micro Systems (Quelle: www.biotec.tu-dresden.de)

Hot Plate

Manufacturer: Electronic Micro Systems Ltd
Model: EMS 1000-1
Facility: Microstructure Facility

Laurell Spin Coater (Quelle: www.biotec.tu-dresden.de)

Spin coater

Manufacturer: Laurell Technologies Corp.
Model: WS-650Hzb-23NPP-UD-3
Facility: Microstructure Facility

EVG Germany Mask aligner (Quelle: www.biotec.tu-dresden.de)

Mask aligner (Photolithography/ UV-NIL)

Manufacturer: EV Group Germany (EVG)
Model: EVG 620
Facility: Microstructure Facility

Gambetti Tucano Plasma Cleaner System (Quelle: www.plasmi.eu)

Plasma Cleaner System

Manufacturer: Gambetti Kenologia Srl
Model: Tucano Plasma Reactor
Facility: Microstructure Facility

Fluorescence Microscope Zeiss Axio Scope.A1 (Quelle: http://www.biotec.tu-dresden.de)

Fluorescence Microscope

Manufacturer: Carl Zeiss Microscopy GmbH
Model: Axio Scope.A1
Facility: Microstructure Facility

BINDER Drying Chamber (Quelle: www.binder-world.com)

Dry oven/ Drying chamber

Manufacturer: BINDER GmbH
Facility: Microstructure Facility

Memmert Drying Oven (Quelle: www.memmert.com)

Dry oven/ Drying chamber

Manufacturer: Memmert GmbH + Co. KG
Facility: Microstructure Facility

POLOS™ MCD 200-Megasonic (Quelle: www.biotec.tu-dresden.de)

Megasonic developer and cleaner (Megpie)

Manufacturer: SPS-Europe B.V. (POLOS™)
Model: POLOS™ MCD 200-Megasonic
Facility: Microstructure Facility

Bruker Dektak XT Stylus Profiler (Quelle: www.biotec.tu-dresden.de/)

Profilometer

Manufacturer: Bruker Corporation
Model: Dektak XT™ stylus profiler
Facility: Microstructure Facility

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