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Equipment of Microstructure Facility (MSF)

Microstructure Facility (MSF)
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Thermal evaporator

Manufacturer: Kurt J. Lesker Company®
Model: NANO 36™
Facility: Microstructure Facility

 

Hot Plate

Manufacturer: Electronic Micro Systems Ltd
Model: EMS 1000-1
Facility: Microstructure Facility

 

Spin coater

Manufacturer: Laurell Technologies Corp.
Model: WS-650Hzb-23NPP-UD-3
Facility: Microstructure Facility

 

Mask aligner (Photolithography/ UV-NIL)

Manufacturer: EV Group Germany (EVG)
Model: EVG 620
Facility: Microstructure Facility

 

Plasma Cleaner System

Manufacturer: Gambetti Kenologia Srl
Model: Tucano Plasma Reactor
Facility: Microstructure Facility

 

Fluorescence Microscope

Manufacturer: Carl Zeiss Microscopy GmbH
Model: Axio Scope.A1
Facility: Microstructure Facility

 

Dry oven/ Drying chamber

Manufacturer: BINDER GmbH
Facility: Microstructure Facility

 

Dry oven/ Drying chamber

Manufacturer: Memmert GmbH + Co. KG
Facility: Microstructure Facility

 

Megasonic developer and cleaner (Megpie)

Manufacturer: SPS-Europe B.V. (POLOS™)
Model: POLOS™ MCD 200-Megasonic
Facility: Microstructure Facility

 

Profilometer

Manufacturer: Bruker Corporation
Model: Dektak XT™ stylus profiler
Facility: Microstructure Facility

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