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View all instruments of this unit ISPROM FTIR gas analytics systems for the time-resolved determination of gas atmospheres
Basic Information
| Name: | ISPROM | |
| Model: | FTIR gas analytics systems for the time-resolved determination of gas atmospheres | |
| Partner: | Fraunhofer Institute for Material and Beam Technology (IWS) |
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Description
FTIR gas analytics systems for the time-resolved determination of gas atmospheres and the concentration flow of the gas species (precursors, intermediate) even in highly particle loaded atmospheres. The system has been developed for applications in CVD coating and etching industries as well as in the semi-conducting industry.
Points of Contact
Last Update
Last updated at: 13 July 2017 at 11:54:11