ISPROM FTIR gas analytics systems for the time-resolved determination of gas atmospheres
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Name: | ISPROM | |
Modell: | FTIR gas analytics systems for the time-resolved determination of gas atmospheres | |
Partner: | Fraunhofer-Institut für Werkstoff- und Strahltechnik (IWS) |
Beschreibung
FTIR gas analytics systems for the time-resolved determination of gas atmospheres and the concentration flow of the gas species (precursors, intermediate) even in highly particle loaded atmospheres. The system has been developed for applications in CVD coating and etching industries as well as in the semi-conducting industry.
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Letztes Update
Zuletzt aktualisiert am: 13. Juli 2017 um 11:54:11