The scanning electron microscope (SEM) makes it possible to achieve a significantly higher magnification rate than a conventional light microscope by electron image formation. With this device, magnifications up to 200,000-fold are possible. Thus, insights into areas of the surface structure which are not possible with conventional means can be obtained. With the use of a micro-tensile module, the REM can show damage to tensile stresses, which may eventually lead to failure of the component. By means of the use of a vacuum diaphragm and thus the generation of a low vacuum in the sample chamber, plastics and nonmetals, which the electrons can not dissipate, can also be imaged very well.