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RIE Si-Tiefenätzanlage ASE

Basic Information

Name: RIE Si-Tiefenätzanlage ASE
Facility: Chair for Semiconductor Technology (HLT)
Partner: Technische Universität Dresden (TUD)

Points of Contact

Prof. Dr. rer. nat. J.W. Bartha/ Mrs. R. Pfennig (Secretary)
Email:
Phone:
+49 351 463-35468
Fax:
+49 351 463-37172

Last Update

Last updated at: 13 July 2017 at 11:54:08