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Equipment of Chair for Semiconductor Technology

Technische Universität Dresden
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Stylus Profilometry

Manufacturer: Veeco
Model: Dektak 8
Facility: Chair for Semiconductor Technology

Profilometer bis 100mm Weglänge. Messungen intrinsischer Schichtspannungen.

 

Wafer saw

Manufacturer: Disco Technologies Japan
Model: DAD3350
Facility: Chair for Semiconductor Technology

 

Focused Ion Beam (FIB)

Manufacturer: FEI
Model: Expida 1285
Facility: Chair for Semiconductor Technology

 

CVS Analysator

Manufacturer: Metrohm AG
Model: VA Computrace 797
Facility: Chair for Semiconductor Technology

 

ALD Anlagen

Manufacturer: FHR / Beneq
Facility: Chair for Semiconductor Technology

 

Temper-, Diffusions- und Oxydationsöfen

Manufacturer: ATV Technologie GmbH Vaterstetten
Model: ATV
Facility: Chair for Semiconductor Technology

 

Anlage zum Chemisch Mechanischen Polieren

Manufacturer: Megapol Fa. Alpisec; G&P Korea
Facility: Chair for Semiconductor Technology