View all instruments of this unit ALD Anlagen FHR / Beneq
Basic Information
| Name: | ALD Anlagen | |
| Manufacturer: | FHR / Beneq | |
| Facility: | Chair for Semiconductor Technology (HLT) | |
| Partner: | Technische Universität Dresden (TUD) |
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Description
2-Kammersystem mit UHV-Analytikkammer-XPS/AFM/STM
Points of Contact
Last Update
Last updated at: 13 July 2017 at 11:54:08