ALD Anlagen FHR / Beneq
Basic Information
Name: | ALD Anlagen | |
Manufacturer: | FHR / Beneq | |
Facility: | Chair for Semiconductor Technology (HLT) | |
Partner: | Technische Universität Dresden (TUD) |
Description
2-Kammersystem mit UHV-Analytikkammer-XPS/AFM/STM
Points of Contact
Last Update
Last updated at: 13 July 2017 at 11:54:08