Vertical in-line sputtering plant (750 mm) ILA 750
Basic Information
Name: | Vertical in-line sputtering plant (750 mm) | |
Model: | ILA 750 | |
Partner: | Fraunhofer Institute for Electron Beam and Plasma Technology (FEP) |
Short Description
Vertical in-line coating plant for developing layer systems and technologies for the deposition of optical, electrical and decorative functional layers.
Description
Vertical in-line coating plant for developing layer systems and technologies for the deposition of optical, electrical and decorative functional layers.
The ILA 750 is our in-line sputtering plant which we use to develop layers, layer stacks, and sputtering processes in a highly efficient way. Flat substrates made of glass, polycarbonate, other polymers, metal sheets, and ceramics can be coated with various layers (metal, metal oxide, metal nitride, and metal oxynitride layers) using reactive and non-reactive sputtering processes.
Typical substrate
- single-sided or two-sided coating of substrates made of metal, plastic, glass or ceramics with substrate dimensions up to 500 × 300 mm2 (maximum 600 × 400 mm2) and a maximum thickness of 60 mm
Range of applications
- development and testing of technological components and key components for the deposition of metals and oxides under near- industrial conditions
- development of optical, electrical, decorative functional layers and layer systems
- coatings:
- for special studies/tests
- for marketing purposes
- for samples for final customers
- pilot production
- evaluation of the economics of the processes
Link to Further Details
https://www.fep.fraunhofer.de/de/Kernkompetenzen/Anlagentechnik/ila_750.html
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Images
Last Update
Last updated at: 7 June 2019 at 09:38:49