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Vertical in-line sputtering plant (750 mm) ILA 750

Basic Information

Name: Vertical in-line sputtering plant (750 mm)
Model: ILA 750
Partner: Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology (FEP)

Short Description

Vertical in-line coating plant for developing layer systems and technologies for the deposition of optical, electrical and decorative functional layers.

Description

Vertical in-line coating plant for developing layer systems and technologies for the deposition of optical, electrical and decorative functional layers.

The ILA 750 is our in-line sputtering plant which we use to develop layers,  layer stacks, and sputtering processes in a highly efficient way. Flat substrates made of glass, polycarbonate, other polymers, metal sheets, and ceramics can be coated with various layers (metal, metal oxide, metal nitride, and metal oxynitride layers) using reactive and non-reactive sputtering processes.

 

Typical substrate

  • single-sided or two-sided coating of substrates made of metal, plastic, glass or ceramics with substrate dimensions up to 500 × 300 mm2 (maximum 600 × 400 mm2) and a maximum thickness of 60 mm

 

Range of applications

  • development and testing of technological components and key components for the deposition of metals and oxides under near- industrial conditions
  • development of optical, electrical, decorative functional layers and layer systems
  • coatings:
  • for special studies/tests
  • for marketing purposes
  • for samples for final customers
  • pilot production
  • evaluation of the economics of the processes

Link to Further Details

https://www.fep.fraunhofer.de/de/Kernkompetenzen/Anlagentechnik/ila_750.html

Options of instrument usage

Points of Contact

Ines Schedwill
Email:
Phone:
+49 351 8823-238
Fax:
+49 351 8823-394

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Last Update

Last updated at: 7 June 2019 at 09:38:49