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Plant for plasma-activated electron beam evaporation VERSA

Basic Information

Name: Plant for plasma-activated electron beam evaporation
Model: VERSA
Partner: Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology (FEP)

Short Description

Vacuum coating plant with high-power electron beam (300 kW) for plasma-activated evaporation under scalable conditions.

Description

Vacuum coating plant with high-power electron beam (300 kW) for plasma-activated evaporation under scalable conditions

Typical substrate

  • coating of sheets made of metal, plastic, glass or ceramics with maximum substrate dimensions of 120 mm × 200 mm
  • coating of three-dimensional components

Range of applications

  • technology development, in particular new plasma processes for high-power deposition and substrate pre-treatment
  • development of new PVD layer systems
  • fundamental studies on plasma-activated electron beam evaporation
  • sample coatings

Link to Further Details

https://www.fep.fraunhofer.de/de/Kernkompetenzen/Anlagentechnik/versa.html

Options of instrument usage

Points of Contact

Ines Schedwill
Email:
Phone:
+49 351 8823-238
Fax:
+49 351 8823-394

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Last Update

Last updated at: 7 June 2019 at 10:13:02