View all instruments of this unit Plant for plasma-activated electron beam evaporation VERSA
Basic Information
| Name: | Plant for plasma-activated electron beam evaporation | |
| Model: | VERSA | |
| Partner: | Fraunhofer Institute for Electron Beam and Plasma Technology (FEP) |
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Short Description
Vacuum coating plant with high-power electron beam (300 kW) for plasma-activated evaporation under scalable conditions.
Description
Vacuum coating plant with high-power electron beam (300 kW) for plasma-activated evaporation under scalable conditions
Typical substrate
- coating of sheets made of metal, plastic, glass or ceramics with maximum substrate dimensions of 120 mm × 200 mm
- coating of three-dimensional components
Range of applications
- technology development, in particular new plasma processes for high-power deposition and substrate pre-treatment
- development of new PVD layer systems
- fundamental studies on plasma-activated electron beam evaporation
- sample coatings
Link to Further Details
https://www.fep.fraunhofer.de/de/Kernkompetenzen/Anlagentechnik/versa.html
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Images
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Source: © Fraunhofer FEP |
Vacuum coating plant VERSA |
Last Update
Last updated at: 7 June 2019 at 10:13:02