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Ionenstrahlätzanlage Veeco Microetch 301 A

Basic Information

Name: Ionenstrahlätzanlage
Manufacturer: Veeco
Model: Microetch 301 A
Facility: Chair for Solid-State Electronics (FKE)
Partner: Technische Universität Dresden (TUD)
Location: Vakuumlabor

Points of Contact

Prof. Dr.-Ing. habil. G. Gerlach/ Mrs. H. Collasch (Sec.)
Email:
Phone:
+49 (0)351 463-32077
Fax:
+49 (0)351 463-32320

Last Update

Last updated at: 13 July 2017 at 11:54:08