View all instruments of this unit RIE/PECVD-Anlage Oxford Plasma Technology Plasmalab 80 Plus
Basic Information
| Name: | RIE/PECVD-Anlage | |
| Manufacturer: | Oxford Plasma Technology | |
| Model: | Plasmalab 80 Plus | |
| Facility: | Chair for Solid-State Electronics (FKE) | |
| Partner: | Technische Universität Dresden (TUD) |
|
| Location: | Vakuumlabor | |
Points of Contact
Last Update
Last updated at: 13 July 2017 at 11:54:08