View all instruments of this unit RIE/PECVD-Anlage Oxford Plasma Technology Plasmalab 80 Plus
Basic Information
| Name: | RIE/PECVD-Anlage | |
| Manufacturer: | Oxford Plasma Technology | |
| Model: | Plasmalab 80 Plus | |
| Facility: | Chair for Solid-State Electronics (FKE) | |
| Partner: | Technische Universität Dresden (TUD) |
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| Location: | Vakuumlabor | |
Points of Contact
Prof. Dr.-Ing. habil. G. Gerlach/ Mrs. H. Collasch (Sec.)
Web:
Email:
Phone:
+49 (0)351 463-32077
Fax:
+49 (0)351 463-32320
Last Update
Last updated at: 13 July 2017 at 11:54:08