View all instruments of this unit RF-Sputteranlage Perkin-Elmer 2400
Basic Information
| Name: | RF-Sputteranlage | |
| Manufacturer: | Perkin-Elmer | |
| Model: | 2400 | |
| Facility: | Chair of Plasma Technology and Deposition Processes | |
| Partner: | Technische Universität Dresden (TUD) |
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Last Update
Last updated at: 13 July 2017 at 11:54:09