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View the profile: Chair of Plasma Technology and Deposition Processes

Equipment of Chair of Plasma Technology and Deposition Processes

Technische Universität Dresden
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RF-Sputteranlage

Manufacturer: Perkin-Elmer
Model: 2400
Facility: Chair of Plasma Technology and Deposition Processes

 

Vakuumbeschichtungsanlage

Manufacturer: Pfeiffer
Model: PLS570
Facility: Chair of Plasma Technology and Deposition Processes

 

Plasmareiniger (Mikrowelle und RF)

Manufacturer: Plasma Electronic
Model: MR300D
Facility: Chair of Plasma Technology and Deposition Processes

 

60 MHz PECVD Quelle

Facility: Chair of Plasma Technology and Deposition Processes

 

Gasflusssputterquelle

Facility: Chair of Plasma Technology and Deposition Processes

 

Vakuumanlage zur Erzeugung von Nanopartikeln und Nanokompositschichten

Facility: Chair of Plasma Technology and Deposition Processes

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