LV Scanning Electron Microscope (SEM)

Manufacturer: JEOL GmbH
Model: JSM-6610LV
Facility: Senior Professorship Microsystems Technology

Rasterelektronenmikroskop mit „Low-Vacuum“-Betrieb.

Stylus Profilometry

Manufacturer: Veeco
Model: Dektak 8
Facility: Chair for Semiconductor Technology

Profilometer bis 100mm Weglänge. Messungen intrinsischer Schichtspannungen.

Wafer saw

Manufacturer: Disco Technologies Japan
Model: DAD3350
Facility: Chair for Semiconductor Technology

Focused Ion Beam (FIB)

Manufacturer: FEI
Model: Expida 1285
Facility: Chair for Semiconductor Technology

CVS Analysator

Manufacturer: Metrohm AG
Model: VA Computrace 797
Facility: Chair for Semiconductor Technology

RIE Si-Tiefenätzanlage ASE

Facility: Chair for Semiconductor Technology

analytisches Ellipsometer

Manufacturer: Woollam
Facility: Chair for Semiconductor Technology

ALD Anlagen

Manufacturer: FHR / Beneq
Facility: Chair for Semiconductor Technology

Temper-, Diffusions- und Oxydationsöfen

Manufacturer: ATV Technologie GmbH Vaterstetten
Model: ATV
Facility: Chair for Semiconductor Technology

Kontaktfotolithografie

Facility: Chair for Semiconductor Technology