The Megasonic Developer is a system characterized by a spin coater equipped with an automatic chemical supplier and a Megasonic transducer to support all the chemical etching processes. The resonator surface lays close to the sample fixed on the spin coater chuck, ensuring a direct method of acoustic energy transmission.

The Polos MCD 200-Megasonic Package is able to automatically release chemicals in the resonator-sample gap, controlling the rate and direction of the rotation and the power supply by the transducer with a direct feedback of the dosage delivered to the sample. The sapphire resonator is compatible with all processing chemistries, and then useful for all solvent aided processes, such as cleaning, development, lift off and wet etching. The system is mainly useful to carry out development process on photoresist with thickness up to 1mm, enhancing the efficiency and the process reproducibility with a fully automatic controll of the process parameters.