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Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)
Manufacturer: Hitachi HTA Model: SU8000 Facility: Materials Analysis
Ionenpräparationssystem Cross Section Polisher
Manufacturer: JEOL GmbH Model: SM-09010 Facility: Materials Analysis
Spectroscopic Ellipsometer
Manufacturer: SENTECH Instruments GmbH Model: SE850 Facility: Materials Analysis
Glimmentladungsspektrometer (GD-OES)
Manufacturer: HORIBA Jobin Yvon GmbH Model: GD-Profiler 2™ Facility: Materials Analysis
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