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View all instruments of this unit Thin Film Stress Measurement System / Eigenspannungsmessgerät dünner Schichten Toho Technology Inc. FLX-2320
Basic Information
| Name: | Thin Film Stress Measurement System / Eigenspannungsmessgerät dünner Schichten | |
| Manufacturer: | Toho Technology Inc. | |
| Model: | FLX-2320 | |
| Facility: | X-Ray and EUV Optics | |
| Partner: | Fraunhofer Institute for Material and Beam Technology (IWS) |
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Link to Further Details
Points of Contact
Dr. Stefan Braun
Web:
Phone:
+49 351 83391-3432
Fax:
+49 351 83391-3314
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Thin Film Stress Measurement / Eigenspannungsmessung an dünnen Schichten |
Images
| Preview | Description |
|---|---|
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FLX-2320 Toho Technology (Quelle: www.iws.fraunhofer.de) |
Last Update
Last updated at: 13 July 2017 at 11:54:12