Thin Film Stress Measurement System / Eigenspannungsmessgerät dünner Schichten Toho Technology Inc. FLX-2320
Basic Information
Name: | Thin Film Stress Measurement System / Eigenspannungsmessgerät dünner Schichten | |
Manufacturer: | Toho Technology Inc. | |
Model: | FLX-2320 | |
Facility: | X-Ray and EUV Optics | |
Partner: | Fraunhofer Institute for Material and Beam Technology (IWS) |
Link to Further Details
Points of Contact
Dr. Stefan Braun
Web:
Phone:
+49 351 83391-3432
Fax:
+49 351 83391-3314
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Associated Services
Name | Preview | Actions |
---|---|---|
Thin Film Stress Measurement / Eigenspannungsmessung an dünnen Schichten |
Images
Last Update
Last updated at: 13 July 2017 at 11:54:12