Technology Portal

Your access to research infrastructure and know-how
View all instruments of this unit

Field Emission Scanning Electron Microscope (FE-SEM) JEOL GmbH JSM-7800F Prime (SEM) FE REM

Basic Information

Name: Field Emission Scanning Electron Microscope (FE-SEM)
Manufacturer: JEOL GmbH
Model: JSM-7800F Prime (SEM) FE REM
Facility: Competence Materials Characterization and Testing
Partner: Fraunhofer Institute for Material and Beam Technology (IWS)

Short Description

Analytical field emission scanning electron microscope with ultra-high resolution


  • Equipment/ technical data
    • Emission: thermal in-lens field emission cathode
    • Acceleration voltage: 10 V to 30 kV
    • Resolution: 0,7 nm for acceleration voltage up to 1 KV
    • Detectors: in-lens SE and BSE, BSE-detector with high resolution, STEM
    • Additional „Gentle-Beam-Super-High (GBSH)“- mode to reduce lens aberration
    • Energy-dispersive an wavelength-dispersive X-ray spectroscopy (EDX and WDX) by Oxford Instruments
  • Methods
    • Imaging and analysis of nanoscaled structure details
    • Imaging and analysis of magnetic specimens with low acceleration voltage
    • Imaging of thin specimens transparent to electrons in STEM-mode
    • Determination of chemical composition including light elements (B,C,N,O)

Options of instrument usage

Points of Contact

Associated Services

Name Preview Actions
Development and evaluation of process- and application-specific testing strategies
High-resolution, imaging and analytical characterization of laser-modified edge zones, joining interfaces, thin-film systems, nanotubes and nanoparticles
Product accompanying quality assurance
Failure and damage analysis
Metallographic, electron microscopic and microanalytical characterization of the real structure of metals, ceramics and composites


Last Update

Last updated at: 5 August 2019 at 10:21:21