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Scanning Electron Microscope (SEM) JEOL GmbH JSM-6610LV

Basic Information

Name: Scanning Electron Microscope (SEM)
Manufacturer: JEOL GmbH
Model: JSM-6610LV
Facility: Competence Materials Characterization and Testing
Partner: Fraunhofer Institute for Material and Beam Technology (IWS)

Short Description

Analytical scanning electron microscope with "Low-Vacuum"


  • Equipment/ technical data
    • Emission: tungsten cathode
    • Acceleration voltage: 1 kV to 30 kV
    • Resolution: 3 nm (30 kV), 15 nm (1 kV)
    • Detectors: SE, BSE
    • “Low-Vacuum”- operation for analysis of low conducting specimens
    • Additional equipment: EDX-detector (Oxford Instruments)
    • Large specimen chamber suitable for specimen size up to 200 mm
  • Methods
    • Scanning electron micrographs of specimen surfaces
    • Analysis of diverse structure specifications of metallic and non-metallic materials  
    • determination of chemical composition including light elements (B,C,N,O) with high local resolution

Options of instrument usage

Points of Contact



Associated Services

Name Preview Actions
Development and evaluation of process- and application-specific testing strategies
Failure and damage analysis
High-resolution, imaging and analytical characterization of laser-modified edge zones, joining interfaces, thin-film systems, nanotubes and nanoparticles
Product accompanying quality assurance
Metallographic, electron microscopic and microanalytical characterization of the real structure of metals, ceramics and composites


Last Update

Last updated at: 5 August 2019 at 10:16:43