Scanning Electron Microscope (SEM) JEOL GmbH JSM-6610LV
Basic Information
Name: | Scanning Electron Microscope (SEM) | |
Manufacturer: | JEOL GmbH | |
Model: | JSM-6610LV | |
Facility: | Competence Materials Characterization and Testing | |
Partner: | Fraunhofer Institute for Material and Beam Technology (IWS) |
Short Description
Analytical scanning electron microscope with "Low-Vacuum"
Description
- Equipment/ technical data
- Emission: tungsten cathode
- Acceleration voltage: 1 kV to 30 kV
- Resolution: 3 nm (30 kV), 15 nm (1 kV)
- Detectors: SE, BSE
- “Low-Vacuum”- operation for analysis of low conducting specimens
- Additional equipment: EDX-detector (Oxford Instruments)
- Large specimen chamber suitable for specimen size up to 200 mm
- Methods
- Scanning electron micrographs of specimen surfaces
- Analysis of diverse structure specifications of metallic and non-metallic materials
- determination of chemical composition including light elements (B,C,N,O) with high local resolution
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Prof. Dr. Martina Zimmermann
Web:
Phone:
+49 351 83391-3573
Notes
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Associated Services
Images
Last Update
Last updated at: 5 August 2019 at 10:16:43