View all instruments of this unit X-Ray Photoelectron Spectroscope (XPS) / Photoelektronenspektroskop PREVAC / VG Scienta PREVAC XPS system with VG Scienta EW 3000 analyser
Basic Information
| Name: | X-Ray Photoelectron Spectroscope (XPS) / Photoelektronenspektroskop | |
| Manufacturer: | PREVAC / VG Scienta | |
| Model: | PREVAC XPS system with VG Scienta EW 3000 analyser | |
| Facility: | Micro Materials Center (MMC) | |
Description
-> Instrument is used for chemical surface analysis.
Measure/Resolution:
chemical composition (at %)
Accessory/Options:
- max. 200 mm wafers
- surface analysis
- depth profiling
- angular resolved acquisition
Link to Further Details
Points of Contact
Prof. Dr. Sven Rzepka (Head of Department)
Web:
Phone:
+49 371 45001-421
Fax:
+49 371 45001-521
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
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PREVAC XPS System (Quelle: www.prevac.eu) |
Last Update
Last updated at: 13 July 2017 at 11:54:13