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Equipment of Micro Materials Center (MMC)

Fraunhofer Institute for Electronic Nano Systems
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Spectroscopic Ellipsometer / Spektralellipsometer

Manufacturer: SENTECH GmbH
Model: SE 850
Facility: Micro Materials Center

 

X-Ray Photoelectron Spectroscope (XPS) / Photoelektronenspektroskop

Manufacturer: PREVAC / VG Scienta
Model: PREVAC XPS system with VG Scienta EW 3000 analyser
Facility: Micro Materials Center

 

Raman Spectroscope

Manufacturer: Renishaw plc.
Model: Reflex
Facility: Micro Materials Center

 

Nano Indenter

Manufacturer: Agilent Technologies
Model: G200
Facility: Micro Materials Center

 

Nanotom® X-Ray Computer Tomography System (XCT)

Manufacturer: GE Phoenix
Model: Nanotom® 180 NF
Facility: Micro Materials Center

 

Atomic Force Microscope (AFM) / Atomkraftmikroskop

Manufacturer: Digital Instruments/Veeco Metrology (today Bruker Corp.)
Model: NanoScope Dimension 3000
Facility: Micro Materials Center

 

Laser Scanning Mikroskop

Manufacturer: Carl Zeiss Microscopy GmbH
Model: LSM 5 Exciter
Facility: Micro Materials Center

 

Cross Beam Scanning Electron Microscope with Focused Ion Beam (SEM/FIB - REM/FIB)

Manufacturer: Carl Zeiss Microscopy GmbH
Model: AURIGA ® 60
Facility: Micro Materials Center

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