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Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop) Carl Zeiss AG SUPRA® 60

Basic Information

Name: Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)
Manufacturer: Carl Zeiss AG
Model: SUPRA® 60
Facility: Micro Materials Center (MMC)

Description

Measure/Resolution:

SEM: 1 nm

Accessory/Options:

  • max. 200 mm wafers
  • BRUKER EDX

Link to Further Details

http://www.zeiss.com/microscopy/en_de/products/scanning-electron-microscopes/supra-materials.html

Points of Contact

Prof. Dr. Sven Rzepka (Head of Department)
Phone:
+49 371 45001-421
Fax:
+49 371 45001-521

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Last Update

Last updated at: 13 July 2017 at 11:54:13