Energy Dispersive X-Ray (EDX) Spectroscope Oxford Instruments INCA x-act
Basic Information
| Name: | Energy Dispersive X-Ray (EDX) Spectroscope | |
| Manufacturer: | Oxford Instruments | |
| Model: | INCA x-act | |
| Partner: | Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID)) | |
Description
Energy Dispersive Spectroscopy (EDS) Analysis provides elemental and chemical analysis of a sample inside the SEM, TEM or FIB.
Link to Further Details
http://www.oxford-instruments.com/products/microanalysis/energy-dispersive-x-ray-systems-eds-edx
Points of Contact
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
Last Update
Last updated at: 13 July 2017 at 11:54:13