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View the profile: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))

Equipment of Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))

Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))
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Confocal Measuring System Confovis ConfoDisc (Quelle: www.confovis.com)

2D / 3D Confocal Measuring System

Manufacturer: confovis GmbH
Model: ConfoDisc CL200/CL300
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 
2D / 3D Wafer Inspection System Camtek Falcon 530 (Quelle: www.exapro.de.com)

2D / 3D Wafer Inspection System

Manufacturer: Camtek Ltd.
Model: Falcon 530
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 
FE SEM Zeiss Gemini (Quelle: www.zeiss.de)

Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)

Manufacturer: Carl Zeiss SMT AG
Model: Leo Gemini 1530
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 

Bow/ Warpage/ TTV

Manufacturer: Sigmatech
Model: SIGMATECH 92H-IR-BD
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 
EDX/ EDS Oxford Instruments INCA x-act (Quelle: www.oxford-instruments.com)

Energy Dispersive X-Ray (EDX) Spectroscope

Manufacturer: Oxford Instruments
Model: INCA x-act
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 
Schertester DAGE 4000 (Quelle: www.fraunhofer.de)

Pull- und Schertester

Manufacturer: Nordson DAGE
Model: 4000
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 

Waferprober

Manufacturer: SÜSS MicroTec (now: Cascade Microtech)
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 

Bruchtester

Manufacturer: Zwick GmbH & Co. KG
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 

TSV-Tiefenmessung

Manufacturer: Filmtech
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

 
Wafer Surface Profiler Veeco Dektak V 300-Si (Quelle: www.caeonline.com)

Wafer Testing And Metrology - Wafer Surface Profiler

Manufacturer: Veeco Instruments Inc.
Model: Dektak V 300-Si
Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden

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