15 results
2D / 3D Confocal Measuring System
Manufacturer: confovis GmbH Model: ConfoDisc CL200/CL300 Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
2D / 3D Wafer Inspection System
Manufacturer: Camtek Ltd. Model: Falcon 530 Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)
Manufacturer: Carl Zeiss SMT AG Model: Leo Gemini 1530 Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Bow/ Warpage/ TTV
Manufacturer: Sigmatech Model: SIGMATECH 92H-IR-BD Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Energy Dispersive X-Ray (EDX) Spectroscope
Manufacturer: Oxford Instruments Model: INCA x-act Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Pull- und Schertester
Manufacturer: Nordson DAGE Model: 4000 Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Waferprober
Manufacturer: SÜSS MicroTec (now: Cascade Microtech) Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Bruchtester
Manufacturer: Zwick GmbH & Co. KG Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
TSV-Tiefenmessung
Manufacturer: Filmtech Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden
Wafer Testing And Metrology - Wafer Surface Profiler
Manufacturer: Veeco Instruments Inc. Model: Dektak V 300-Si Facility: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden