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Schichtdickenmesssystem Nova / Fries Research & Technology GmbH (FRT)

Basic Information

Name: Schichtdickenmesssystem
Manufacturer: Nova / Fries Research & Technology GmbH (FRT)
Partner: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))

Link to Further Details

http://www.frt-gmbh.com/en/your-expert-for-surface-metrology.aspx

Points of Contact

M. Jürgen Wolf
Email:
Phone:
+49 351 795572-12
Fax:
+49 351 795572-19

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Last Update

Last updated at: 13 July 2017 at 11:54:13