Temper-, Diffusions- und Oxydationsöfen ATV Technologie GmbH Vaterstetten ATV
Basic Information
Name: | Temper-, Diffusions- und Oxydationsöfen | |
Manufacturer: | ATV Technologie GmbH Vaterstetten | |
Model: | ATV | |
Facility: | Chair for Semiconductor Technology (HLT) | |
Partner: | Technische Universität Dresden (TUD) | |
Location: | Cleanroom Mierdel-Bau |
Points of Contact
Last Update
Last updated at: 13 July 2017 at 11:54:08