View all instruments of this unit Temper-, Diffusions- und Oxydationsöfen ATV Technologie GmbH Vaterstetten ATV
Basic Information
| Name: | Temper-, Diffusions- und Oxydationsöfen | |
| Manufacturer: | ATV Technologie GmbH Vaterstetten | |
| Model: | ATV | |
| Facility: | Chair for Semiconductor Technology (HLT) | |
| Partner: | Technische Universität Dresden (TUD) |
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| Location: | Cleanroom Mierdel-Bau | |
Points of Contact
Prof. Dr. rer. nat. J.W. Bartha/ Mrs. R. Pfennig (Secretary)
Web:
Email:
Phone:
+49 351 463-35468
Fax:
+49 351 463-37172
Last Update
Last updated at: 13 July 2017 at 11:54:08