Dresden
Technology Portal

Your access to research infrastructure and know-how

View all instruments of this unit

Analytic double-beam-system Focused Ion Beam and scanning electron microscope JEOL JIB-4610F

Basic Information

Name:	Analytic double-beam-system Focused Ion Beam and scanning electron microscope
Manufacturer:	JEOL
Model:	JIB-4610F
Facility:	Competence Materials Characterization and Testing
Partner:	Fraunhofer Institute for Material and Beam Technology (IWS)

Short Description

Analytic double-beam-system Focused Ion Beam and scanning electron microscope - JEOL JIB-4610F

Description

Equipment/ technical data
- Emission: thermal in-lens field emission source (max. 200 nA at 0,1 to 30 kV)
- Ion source: Ga liquid metal (3 pA to max. 90 nA at 30 kV)
- Resolution: 1.2 nm (at 30kV, REM), 4 nm (at 30 kV, SIM)
- Detectors: SE, BSE and STEM for “Live”-preparation of translucent TEM-specimens
- Micromanipulator for TEM-specimen extraction (Kleindiek)
- Additional equipment: EDX- and BDSM-systems
Methods
- Effective, low-damage high-precision target-preparation of different materials (i.a. metal, synthetic material, composite, layer, nanomaterials)
- „Microfabrication“ / „Nanofabrication“:
  - Production of diverse geometric structures
  - Typical volumes: 10 μm³
  - Typical precision: 10 nm
- 3D-analysis of materials, thermography and 3D-reconstructions; in each case possible to combine with EDX- and BDSM-analysis
- Effective treatment of large surfaces and volumes with ion-ablation with an ion-current up to 90nA

Options of instrument usage

This instrument is used within a service or research collaboration.

Points of Contact

Prof. Dr. Martina Zimmermann

Web:

http://www.iws.fraunhofer.de/en/business_fields/materials_characterization/service_offers.html

Phone:

+49 351 83391-3573

Associated Services

Name	Preview	Actions
Development and evaluation of process- and application-specific testing strategies
Target preparation for the investigation of defects in materials and components made of metallic and non-metallic materials
Metallographic, electron microscopic and microanalytical characterization of the real structure of metals, ceramics and composites
Product accompanying quality assurance
High-resolution, imaging and analytical characterization of laser-modified edge zones, joining interfaces, thin-film systems, nanotubes and nanoparticles
Failure and damage analysis

Images

Preview	Description
Source: Fraunhofer IWS	Analytic double-beam-system Focused Ion Beam and scanning electron microscope - JEOL JIB-4610F

Last Update

Last updated at: 5 August 2019 at 10:31:22