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Profilometer KLA Tencor surface Profiler P16+

Basic Information

Name: Profilometer
Manufacturer: KLA Tencor
Model: surface Profiler P16+
Facility: 200 mm MEMS-Cleanroom
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)
Inventory number: MTR-PROF03

Description

We can measure: Step height, mapping and 3D imaging of surfaces. 

Options of instrument usage

Points of Contact

Jörg Amelung
Email:
Phone:
+49 351 88 23-4691

Last Update

Last updated at: 14 January 2025 at 15:03:17