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Equipment of MEMS Technologies Dresden

Fraunhofer Institute for Photonic Microsystems
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Defect Inspection System

Manufacturer: KLA-Tencor Corporation
Model: Surfscan 6220
Facility: MEMS Technologies Dresden

 

Tunable Diode Laser System

Manufacturer: New Focus™
Model: TLB-6200
Facility: MEMS Technologies Dresden

 

Twymen-Green-Interferometer

Manufacturer: TRIOPTICS GmbH (FISBA OPTIK GmbH)
Model: µPhase® DCI 2
Facility: MEMS Technologies Dresden

 

Microscope Scanning Vibrometer

Manufacturer: Polytec GmbH
Model: MSV-300
Facility: MEMS Technologies Dresden

 

X-Ray Diffractometer (XRD)

Manufacturer: Siemens AG
Model: D5000
Facility: MEMS Technologies Dresden

 

Ellipsometer

Manufacturer: J.A. Woollam Co. Inc.
Model: VB-400
Facility: MEMS Technologies Dresden

 

Energy Dispersive X-ray Spectroscope (EDS)

Manufacturer: EDAX Inc.
Model: Apollo 40
Facility: MEMS Technologies Dresden

 

AMAT Defect Inspection

Manufacturer: Applied Materials Inc. (AMAT)
Model: Compass Pro
Facility: MEMS Technologies Dresden

 

FT-IR Microspectroscopy System

Manufacturer: Thermo Fisher Scientific GmbH
Model: Nicolet FT-IR Spectrometer 6700
Facility: MEMS Technologies Dresden

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