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Equipment of 200 mm MEMS-Cleanroom

Fraunhofer Institute for Photonic Microsystems
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Defect Inspection System

Manufacturer: KLA-Tencor Corporation
Model: Surfscan 6220
Facility: MEMS Technologies Dresden

 

X-Ray Diffractometer (XRD)

Manufacturer: Siemens AG
Model: D5000
Facility: MEMS Technologies Dresden

 

Ellipsometer

Manufacturer: J.A. Woollam Co. Inc.
Model: VB-400
Facility: MEMS Technologies Dresden

 

AMAT Defect Inspection

Manufacturer: Applied Materials Inc. (AMAT)
Model: Compass Pro
Facility: MEMS Technologies Dresden

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