13 results
Defect Inspection System
Manufacturer: KLA-Tencor Corporation Model: Surfscan 6220 Facility: MEMS Technologies Dresden
Tunable Diode Laser System
Manufacturer: New Focus™ Model: TLB-6200 Facility: MEMS Technologies Dresden
Twymen-Green-Interferometer
Manufacturer: TRIOPTICS GmbH (FISBA OPTIK GmbH) Model: µPhase® DCI 2 Facility: MEMS Technologies Dresden
Microscope Scanning Vibrometer
Manufacturer: Polytec GmbH Model: MSV-300 Facility: MEMS Technologies Dresden
X-Ray Diffractometer (XRD)
Manufacturer: Siemens AG Model: D5000 Facility: MEMS Technologies Dresden
Energy Dispersive X-ray Spectroscope (EDS)
Manufacturer: EDAX Inc. Model: Apollo 40 Facility: MEMS Technologies Dresden
AMAT Defect Inspection
Manufacturer: Applied Materials Inc. (AMAT) Model: Compass Pro Facility: MEMS Technologies Dresden
FT-IR Microspectroscopy System
Manufacturer: Thermo Fisher Scientific GmbH Model: Nicolet FT-IR Spectrometer 6700 Facility: MEMS Technologies Dresden
Weisslichtinterferometer / White-Light Interferometer (Optical Profiler)
Manufacturer: Veeco Instruments Model: NT8000 Facility: MEMS Technologies Dresden