45 results
Sensor Actor Test System for MEMS / MOEMS
Manufacturer: Formfactor Model: AP200 Facility: 200 mm MEMS-Cleanroom
Characterization of Insulator Integrity and Reliability
Manufacturer: Keithley Model: K236, K237 und K238 Facility: 200 mm MEMS-Cleanroom
CV Analysis
Manufacturer: Keithley, Keysight Model: B1500, HP4294A, HP4295A, K590 Facility: 200 mm MEMS-Cleanroom
Non-electrical Test
Manufacturer: Endevco Model: pH Sensor Tester Fraunhofer IPMS Facility: 200 mm MEMS-Cleanroom
Electro-Optical Test System for Micro Displays and Sensors
Manufacturer: Formfactor Model: F1600C Pike Camera, 20 Mpix IDS Color Camera Spectrometer Jeti Specbos 1211UV PA300 Facility: 200 mm MEMS-Cleanroom
Parametric Test System
Manufacturer: Keithley Model: S530 basic EG4090µ; B1500 EG4090µ UF3000EX Facility: 200 mm MEMS-Cleanroom
Mixed Signal Testing
Manufacturer: Advantest; Cascade Microtech Model: M3650 / EG4090μ / UF3000EX; M3670-Falcon / EG4090μ+ / PA300 ; V93000 SmartScale / EG4090µ / UF3000EX| Facility: 200 mm MEMS-Cleanroom
Wafer measurement
Manufacturer: sentronics metrology Model: SemDex M2 Facility: 200 mm MEMS-Cleanroom
Stress measurement
Manufacturer: Frontier Semiconductor Model: FSM500-TC-R Facility: 200 mm MEMS-Cleanroom
4-point measuring station for Sheet resistance
Manufacturer: veonis technologies Model: CDE ResMap168 Facility: 200 mm MEMS-Cleanroom


