6 results
Weisslichtinterferometer / White-Light Interferometer (Optical Profiler)
Manufacturer: Veeco Instruments
Model: NT8000
Facility: 200 mm MEMS-Cleanroom
Defect Inspection System
Manufacturer: KLA-Tencor Corporation
Model: Surfscan 6220
Facility: MEMS Technologies Dresden
X-Ray Diffractometer (XRD)
Manufacturer: Siemens AG
Model: D5000
Facility: MEMS Technologies Dresden
AMAT Defect Inspection
Manufacturer: Applied Materials Inc. (AMAT)
Model: Compass Pro
Facility: MEMS Technologies Dresden
Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)
Manufacturer: JEOL GmbH
Model: JSM-6700F
Facility: MEMS Technologies Dresden