MEMS Technologies Dresden (Division)
Parent Units:Fraunhofer Institute for Photonic Microsystems (IPMS)
Contact
web: | http://www.ipms.fraunhofer.de/en/mems-foundry.html | |
phone: | +49 351 8823-130 | |
fax: | +49 351 8823-393 | |
address: | Fraunhofer Institute for Photonic Microsystems (IPMS), MEMS Technologies Dresden, Maria-Reiche-Str. 2, 01109 Dresden, Germany | |
partner: | Fraunhofer Institute for Photonic Microsystems |
Expertise
Fraunhofer IPMS develops for its customers products and technologies in the realm of microelectromechanical systems (MEMS), and micro-opto-electro-mechanical systems (MOEMS). Our capabilities span the entire development arc for MEMS and MOEMS products and technologies. Upon request, we can either undertake in-house pilot and low-volume fabrication, or support technology transfer to a facility of the client's choice. In these endeavors, we use our existing technological capabilities for bulk MEMS, surface MEMS, and the monolithic integration of CMOS and MEMS/MOEMS. Our work is performed in a state-of-the-art MEMS clean room, capable of handling 150 mm wafers.
For more information see Brochure.
instruments
View instruments (13)Affiliations
Parent Units
name | type | actions |
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Fraunhofer Institute for Photonic Microsystems (IPMS) | Institute | view |
Last Update
Last updated at: 2015-08-27 12:07