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MEMS Technologies Dresden (Division)

Parent Units:
Fraunhofer Institute for Photonic Microsystems (IPMS)


web: http://www.ipms.fraunhofer.de/en/mems-foundry.html
phone: +49 351 8823-130
fax: +49 351 8823-393
address: Fraunhofer Institute for Photonic Microsystems (IPMS), MEMS Technologies Dresden, Maria-Reiche-Str. 2, 01109 Dresden, Germany
partner: Fraunhofer Institute for Photonic Microsystems


Fraunhofer IPMS develops for its customers products and technologies in the realm of microelectromechanical systems (MEMS), and micro-opto-electro-mechanical systems (MOEMS). Our capabilities span the entire development arc for MEMS and MOEMS products and technologies. Upon request, we can either undertake in-house pilot and low-volume fabrication, or support technology transfer to a facility of the client's choice. In these endeavors, we use our existing technological capabilities for bulk MEMS, surface MEMS, and the monolithic integration of CMOS and MEMS/MOEMS. Our work is performed in a state-of-the-art MEMS clean room, capable of handling 150 mm wafers.

For more information see Brochure.


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Parent Units

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Fraunhofer Institute for Photonic Microsystems (IPMS) Institute view

Last Update

Last updated at: 2015-08-27 12:07