MEMS Technologies Dresden (Division)Parent Units:
Fraunhofer Institute for Photonic Microsystems (IPMS)
|phone:||+49 351 8823-130|
|fax:||+49 351 8823-393|
|address:||Fraunhofer Institute for Photonic Microsystems (IPMS), MEMS Technologies Dresden, Maria-Reiche-Str. 2, 01109 Dresden, Germany|
|partner:||Fraunhofer Institute for Photonic Microsystems|
Fraunhofer IPMS develops for its customers products and technologies in the realm of microelectromechanical systems (MEMS), and micro-opto-electro-mechanical systems (MOEMS). Our capabilities span the entire development arc for MEMS and MOEMS products and technologies. Upon request, we can either undertake in-house pilot and low-volume fabrication, or support technology transfer to a facility of the client's choice. In these endeavors, we use our existing technological capabilities for bulk MEMS, surface MEMS, and the monolithic integration of CMOS and MEMS/MOEMS. Our work is performed in a state-of-the-art MEMS clean room, capable of handling 150 mm wafers.
For more information see Brochure.
|Fraunhofer Institute for Photonic Microsystems (IPMS)||Institute|
Last updated at: 2015-08-27 12:07