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Please do not update any equipment entries here anymore. Use the new portal from now on.
We will provide a link to the successor service once it goes live.
Please do not update any equipment entries here anymore. Use the new portal from now on.
View all instruments of this unit Photo lithografy
Basic Information
| Name: | Photo lithografy | |
| Facility: | Chair of Coating Technologies in Electronics | |
| Partner: | Technische Universität Dresden (TUD) |
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| Location: | WHB | |
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Access Requirements
Preliminary consultation required, no independent use
Last Update
Last updated at: 10 March 2026 at 12:00:39