View all instruments of this unit 60 MHz PECVD Quelle
Basic Information
| Name: | 60 MHz PECVD Quelle | |
| Facility: | Chair of Plasma Technology and Deposition Processes | |
| Partner: | Technische Universität Dresden (TUD) |
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Description
zur Abscheidung von Plasmapolymer- und anorganischen Kompositschichten
Points of Contact
Professorship
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Last Update
Last updated at: 13 July 2017 at 11:54:08