Vakuumbeschichtungsanlage Pfeiffer PLS570
Basic Information
Name: | Vakuumbeschichtungsanlage | |
Manufacturer: | Pfeiffer | |
Model: | PLS570 | |
Facility: | Chair of Plasma Technology and Deposition Processes | |
Partner: | Technische Universität Dresden (TUD) |
Description
mit Pulssputtertechnologie
Points of Contact
Professorship
Web:
Last Update
Last updated at: 13 July 2017 at 11:54:09