View all instruments of this unit Vakuumbeschichtungsanlage Pfeiffer PLS570
Basic Information
| Name: | Vakuumbeschichtungsanlage | |
| Manufacturer: | Pfeiffer | |
| Model: | PLS570 | |
| Facility: | Chair of Plasma Technology and Deposition Processes | |
| Partner: | Technische Universität Dresden (TUD) |
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Description
mit Pulssputtertechnologie
Points of Contact
Professorship
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Last Update
Last updated at: 13 July 2017 at 11:54:09