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Vakuumbeschichtungsanlage Pfeiffer PLS570

Basic Information

Name: Vakuumbeschichtungsanlage
Manufacturer: Pfeiffer
Model: PLS570
Facility: Chair of Plasma Technology and Deposition Processes
Partner: Technische Universität Dresden (TUD)

Description

mit Pulssputtertechnologie

Points of Contact

Last Update

Last updated at: 13 July 2017 at 11:54:09