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Fotolithografie

Basic Information

Name: Fotolithografie
Facility: Chair for Semiconductor Technology (HLT)
Partner: Technische Universität Dresden (TUD)

Description

(Strukturgrößen >0.5 µm)
mit Beschichter, Mask Aligner und Entwickler für 6-8 inch Wafern

Link to Further Details

https://tu-dresden.de/ing/elektrotechnik/ihm/hlt/kooperation/angebote

Points of Contact

Dr.rer.nat. Wenzel, Christian
Position:
Institutsoberassistent / senior scientist
Email:
Phone:
+4935146336413
Fax:
+4935146337172
Prof. Dr. rer. nat. J.W. Bartha/ Mrs. R. Pfennig (Secretary)
Email:
Phone:
+49 351 463-35468
Fax:
+49 351 463-37172

Last Update

Last updated at: 13 July 2017 at 11:54:17