Si-deep etching for MEMS, MOEMS and microfluidic
Basic Information
Name: | Si-deep etching for MEMS, MOEMS and microfluidic | |
Facility: | Chair for Semiconductor Technology (HLT) | |
Partner: | Technische Universität Dresden (TUD) |
Short Description
Si-deep etching for MEMS, MOEMS and microfluidic.
Description
Si-deep etching for MEMS, MOEMS and microfluidic.
Points of Contact
Dr.rer.nat. Wenzel, Christian
Position:
Institutsoberassistent / senior scientist
Phone:
+4935146336413
Fax:
+4935146337172
Prof. Dr. rer. nat. J.W. Bartha/ Mrs. R. Pfennig (Secretary)
Phone:
+49 351 463-35468
Fax:
+49 351 463-37172
Images
Last Update
Last updated at: 27 March 2018 at 11:19:25