Dresden
Technology Portal

 
Your access to research infrastructure and know-how
de|en
View all services of this unit

Si-deep etching for MEMS, MOEMS and microfluidic

Basic Information

Name: Si-deep etching for MEMS, MOEMS and microfluidic
Facility: Chair for Semiconductor Technology (HLT)
Partner: Technische Universität Dresden (TUD)

Short Description

Si-deep etching for MEMS, MOEMS and microfluidic.

Description

Si-deep etching for MEMS, MOEMS and microfluidic.

Points of Contact

Dr.rer.nat. Wenzel, Christian
Position:
Institutsoberassistent / senior scientist
Email:
Phone:
+4935146336413
Fax:
+4935146337172
Prof. Dr. rer. nat. J.W. Bartha/ Mrs. R. Pfennig (Secretary)
Email:
Phone:
+49 351 463-35468
Fax:
+49 351 463-37172

Images

Last Update

Last updated at: 27 March 2018 at 11:19:25