View all instruments of this unit Spectroscopic Ellipsometer / Spektralellipsometer SENTECH GmbH SE 850
Basic Information
| Name: | Spectroscopic Ellipsometer / Spektralellipsometer | |
| Manufacturer: | SENTECH GmbH | |
| Model: | SE 850 | |
| Facility: | Micro Materials Center (MMC) | |
Description
The task of a spectroscopic ellipsometer is to determine layer thickness and optical properties of single or multi-layered surfaces.
Measure/Resolution:
300 mm stage, spectral range: UV/vis/nIR (190…2300nm)
Accessory/Options:
Micro spot accessory
Link to Further Details
Points of Contact
Prof. Dr. Sven Rzepka (Head of Department)
Web:
Phone:
+49 371 45001-421
Fax:
+49 371 45001-521
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
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Spectroscopic Ellipsometer SENTECH SE 850 (Quelle: www.sentech.com) |
Last Update
Last updated at: 13 July 2017 at 11:54:13