View all instruments of this unit Cross Beam Scanning Electron Microscope with Focused Ion Beam (SEM/FIB - REM/FIB) Carl Zeiss Microscopy GmbH AURIGA ® 60
Basic Information
| Name: | Cross Beam Scanning Electron Microscope with Focused Ion Beam (SEM/FIB - REM/FIB) | |
| Manufacturer: | Carl Zeiss Microscopy GmbH | |
| Model: | AURIGA ® 60 | |
| Facility: | Micro Materials Center (MMC) | |
Description
Measure/Resolution:
FIB: 3 nm, REM, STEM: 1 nm
Accessory/Options:
max. 200 mm wafers; BRUKER EDX
Link to Further Details
http://www.zeiss.com/microscopy/en_de/products/fib-sem-instruments.html
Points of Contact
Prof. Dr. Sven Rzepka (Head of Department)
Web:
Phone:
+49 371 45001-421
Fax:
+49 371 45001-521
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
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Zeiss AURIGA 60 SEM/FIB (Quelle: www.zeiss.com) |
Last Update
Last updated at: 13 July 2017 at 11:54:13