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MEMS Technologies Dresden (Abteilung)

übergeordnete Einrichtungen:
Fraunhofer-Institut für Photonische Mikrosysteme (IPMS)


Web: http://www.ipms.fraunhofer.de/en/mems-foundry.html
Telefon: +49 351 8823-130
Fax: +49 351 8823-393
Adresse: Fraunhofer-Institut für Photonische Mikrosysteme (IPMS), MEMS Technologies Dresden, Maria-Reiche-Str. 2, 01109 Dresden, Germany
Partner: Fraunhofer-Institut für Photonische Mikrosysteme


Fraunhofer IPMS develops for its customers products and technologies in the realm of microelectromechanical systems (MEMS), and micro-opto-electro-mechanical systems (MOEMS). Our capabilities span the entire development arc for MEMS and MOEMS products and technologies. Upon request, we can either undertake in-house pilot and low-volume fabrication, or support technology transfer to a facility of the client's choice. In these endeavors, we use our existing technological capabilities for bulk MEMS, surface MEMS, and the monolithic integration of CMOS and MEMS/MOEMS. Our work is performed in a state-of-the-art MEMS clean room, capable of handling 150 mm wafers.

For more information see Brochure.


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übergeordnete Einrichtungen

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Letztes Update

Letztes Update am: 27.08.2015 12:07 CEST