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Micro- and Nanostructures (Fachrichtung)

übergeordnete Einrichtungen:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden (IFW Dresden)


Web: https://www.ifw-dresden.de/institutes/institute-for-complex-materials/
E-Mail: e-mail
Telefon: +49 (0) 351 4659-217
Fax: +49 (0) 351 4659-452
Adresse: Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden (IFW Dresden), Micro- and Nanostructures, Helmholtzstr. 20, 01069 Dresden
Partner: Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden


In our department, micro- and nanostructured materials and devices are investigated. This ranges from the basic interaction of Fe with C, the deposition of metals films by various methods up to functional devices and applications based on surface acoustic wave (SAW) technology. Furthermore, modern transmission electron microscopy (TEM) is used to image and characterize nano structured materials on a nanometer scale. The spectroscopic methods we use are Energy Dispersive X-ray Spectroscopy (EDXS) and Electron Energy Loss Spectroscopy (EELS and ELNES). Material classes include thin metallic films, multi layers having special magnetic or electronic properties, molecular nanostructures like graphene or carbon nanotubes, and other interesting materials. Also various in-situ experiments are carried out in the electron microscopes.


Research Topics

Surface Acoustic Waves: Concepts, Materials & Applications

  • Preparation, microstructure investigation and structuring of functional thin films (e.g. metallization layers, dielectrics, piezoelectrics)
  • SAW devices and damage processes by acoustomigration
  • Technology platform for SAW-based microfluidic actuation
  • Surface Acoustic Wave (SAW) based aerosol generation / fluid atomization
  • Backend chip processing (e.g. dicing, wire bonding)
  • Thin film analytics
  • ...for further information please visit SAWLab Saxony


Analytical Methods:

Materials and Devices for Microelectronics:

Deposition processes:

Composite Materials:


Overview available methods

The following methods are available and can be performed in the department:


TEM - Transmission Electron Microscopy
SEM - Scanning Electron Microscopy
FIB - Focussed Ion Beam
  • Imaging with Ions
  • Structuring with Ions
  • Local Deposition of Metal Films by Ions and Electrons (EBID & IBID)
Deposition of Films with the Clustertool CARMEN
  • DC magnetron co-sputtering of metals
  • HF magnetron sputtering of metals and barrier films
  • HF magnetron sputtering of insulators
  • E-beam evaporation of metals


Further methods:


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übergeordnete Einrichtungen

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Letztes Update

Letztes Update am: 21.02.2017 10:12 CET