View all instruments of this unit Field Emission Scanning Electron Microscope (FE SEM ) JEOL GmbH; FEI JSM-6700F; Helios Nanolab 660
Basic Information
| Name: | Field Emission Scanning Electron Microscope (FE SEM ) | |
| Manufacturer: | JEOL GmbH; FEI | |
| Model: | JSM-6700F; Helios Nanolab 660 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | SEM01; SEM02 | |
Description
- 3D Inspection
- Analysis SEM with FIB cut
Link to Further Details
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
| Preview | Description |
|---|---|
|
FE SEM Jeol JSM-6700F |
Last Update
Last updated at: 14 January 2025 at 14:17:02