X - Ray Fluorescence (XRF) Spectrometer - Wafer Analyzer Phillips (now: PANalytical B.V.) PW2830

Basic Information

Name:	X - Ray Fluorescence (XRF) Spectrometer - Wafer Analyzer
Manufacturer:	Phillips (now: PANalytical B.V.)
Model:	PW2830
Partner:	Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))

Description

The PW2830 XRF wafer analyzer from Philips Analytical determines layer composition, layer thickness, contamination, dopant levels, and surface uniformity on semiconductor wafer sizes up to 300 mm.

Link to Further Details

http://www.panalytical.com/XRF-spectrometers.htm

Points of Contact

M. Jürgen Wolf

Web:

http://www.izm.fraunhofer.de/de/abteilungen/high_density_interconnectwaferlevelpackaging.html

Email:

e-mail

Phone:

+49 351 795572-12

Fax:

+49 351 795572-19

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Preview	Description
	PANalytical XRF Spectrometer 2830 ZT (Quelle: www.panalytical.com)

Last Update

Last updated at: 13 July 2017 at 11:54:13