X - Ray Fluorescence (XRF) Spectrometer - Wafer Analyzer Phillips (now: PANalytical B.V.) PW2830
Basic Information
Name: | X - Ray Fluorescence (XRF) Spectrometer - Wafer Analyzer | |
Manufacturer: | Phillips (now: PANalytical B.V.) | |
Model: | PW2830 | |
Partner: | Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID)) |
Description
The PW2830 XRF wafer analyzer from Philips Analytical determines layer composition, layer thickness, contamination, dopant levels, and surface uniformity on semiconductor wafer sizes up to 300 mm.
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Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
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Last Update
Last updated at: 13 July 2017 at 11:54:13